Super-resolution Optical Measurement of Nanoscale Photoacid Distribution in Lithographic Materials
Author:
Affiliation:
1. Center for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States,
2. Department of Chemistry, Korea University, Seoul 136-701, Korea
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/nn304285m
Reference47 articles.
1. Microscopy beyond the diffraction limit using actively controlled single molecules
2. Conformational analysis of single polymer chains in three dimensions by super-resolution fluorescence microscopy
3. Ultralong-Range Polaron-Induced Quenching of Excitons in Isolated Conjugated Polymers
4. Polymers and single molecule fluorescence spectroscopy, what can we learn?
5. Lithographic Imaging Techniques for the Formation of Nanoscopic Features
Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Photoinduced 6π‐electrocyclization of 2,5‐dichlorothiophene containing benzofuranylacrylonitriles as efficient method for the generation of hydrogen chloride;Journal of Heterocyclic Chemistry;2022-10
2. Preliminary study of photomask pattern inspection by beam-shaped knife-edge interferometry;Precision Engineering;2022-09
3. Super‐Resolution Lifetime Imaging of Single Molecules Near Gold Bowtie Nanoparticles;Advanced Optical Materials;2022-08-21
4. Photoinduced 6π-Electrocyclization of 2,5-Dichlorothiophene Containing Benzofuranylacrylonitriles as Efficient Method for the Generation of Hydrogen Chloride;SSRN Electronic Journal;2022
5. Fluorescent Labeling to Investigate Nanopatterning Processes in Extreme Ultraviolet Lithography;ACS Applied Materials & Interfaces;2021-10-20
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3