Buffered Oxide Etchant Post-Treatment of a Silicon Nanofilm for Low-Cost and Performance-Enhanced Chemical Sensors-Reference-Cited by-同舟云学术

Buffered Oxide Etchant Post-Treatment of a Silicon Nanofilm for Low-Cost and Performance-Enhanced Chemical Sensors

Published:2020-07-27 Issue:33 Volume:12 Page:37128-37136
ISSN:1944-8244
Container-title:ACS Applied Materials & Interfaces
language:en
Short-container-title:ACS Appl. Mater. Interfaces

Author:

Gao Min¹,Zhao Zhi-Jun²,Kim Hyeonggyun¹,Jin Mingliang³⁴,Li Panpan⁵,Kim Taehwan¹,Kang Kyungnam¹,Cho Incheol¹,Jeong Jun-Ho²^ORCID,Park Inkyu¹^ORCID

Affiliation:

1. Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, South Korea

2. Nano-Convergence Mechanical System ResearchCenter, Korea Institute of Machinery and Materials, Daejeon 34113, South Korea

3. Institute for Future, Qingdao University, Ningxia Road 308, Qingdao 266071, China

4. Institute for Translational Medicine, Medical College of Qingdao University, Dengzhou Road 38, Qingdao 266021, China

5. Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141, South Korea

Funder

National Research Foundation of Korea

Ministry of Oceans and Fisheries

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsami.0c08977

Reference42 articles.

1. Multivariable Sensors for Ubiquitous Monitoring of Gases in the Era of Internet of Things and Industrial Internet

2. Disease Detection with Molecular Biomarkers: From Chemistry of Body Fluids to Nature-Inspired Chemical Sensors

3. Silicon Nanomaterials Platform for Bioimaging, Biosensing, and Cancer Therapy

4. Silicon-Nanowire-Based CMOS-Compatible Field-Effect Transistor Nanosensors for Ultrasensitive Electrical Detection of Nucleic Acids

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