Selection Criteria for Small-Molecule Inhibitors in Area-Selective Atomic Layer Deposition: Fundamental Surface Chemistry Considerations
Author:
Affiliation:
1. TNO-Holst Centre, High Tech Campus 31, 5656 AE Eindhoven, The Netherlands
2. Department of Chemistry and Biochemistry, University of Delaware, Newark, Delaware 19716, United States
Funder
Division of Civil, Mechanical and Manufacturing Innovation
Publisher
American Chemical Society (ACS)
Subject
General Medicine,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.accounts.3c00221
Reference61 articles.
1. In situ investigation of organic ligand displacement processes on ZnO powder surface
2. Computational Investigation of Electronic and Steric Effects in Surface Reactions of Metalorganic Precursors on Functionalized Silicon Surfaces
3. Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle
4. Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors
5. Area-Selective Deposition: Fundamentals, Applications, and Future Outlook
Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Gum Arabic-stabilized upconverting nanoparticles for printing applications;Optical Materials: X;2024-02
2. Reactive Vapor-Phase Inhibitors for Area-Selective Depositions at Tunable Critical Dimensions;ACS Applied Materials & Interfaces;2024-01-11
3. Enhancement of Conformality of Silicon Nitride Thin Films by ABC‐Type Atomic Layer Deposition;Advanced Electronic Materials;2023-12-18
4. Atomic layer deposition in the design of functional materials for sensing/removing toxic gases;Current Opinion in Environmental Science & Health;2023-12
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3