1. School of Microelectronics, University of Science and Technology of China, No. 96 Jinzhai Road, Hefei, Anhui 230026, P. R. China
2. Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangzhou 510535, P. R. China
3. Key Laboratory of Microelectronic Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, P. R. China