Derivation of Multiple Covarying Material and Process Parameters Using Physics-Based Modeling of X-ray Data-Reference-Cited by-同舟云学术

Derivation of Multiple Covarying Material and Process Parameters Using Physics-Based Modeling of X-ray Data

Published:2017-09-28 Issue:19 Volume:50 Page:7783-7793
ISSN:0024-9297
Container-title:Macromolecules
language:en
Short-container-title:Macromolecules

Author:

Khaira Gurdaman¹,Doxastakis Manolis²,Bowen Alec³,Ren Jiaxing³,Suh Hyo Seon³,Segal-Peretz Tamar⁴^ORCID,Chen Xuanxuan³,Zhou Chun³,Hannon Adam F.⁵^ORCID,Ferrier Nicola J.⁶,Vishwanath Venkatram⁶,Sunday Daniel F.⁵^ORCID,Gronheid Roel⁷,Kline R. Joseph⁵,de Pablo Juan J.³⁶^ORCID,Nealey Paul F.³⁶^ORCID

Affiliation:

1. Mentor: A Siemens Business, Wilsonville, Oregon 97070, United States

2. Department of Chemical and Biomolecular Engineering, University of Tennessee, Knoxville, Tennessee 37996, United States

3. Institute for Molecular Engineering, The University of Chicago, Chicago, Illinois 60637, United States

4. Department of Chemical Engineering, Technion - Israel Institute of Technology, Haifa 32000, Israel

5. Material Science and Engineering Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, United States

6. Argonne National Laboratory, Argonne, Illinois 60439, United States

7. imec, Kapeldreef 75, B-3001 Leuven, Belgium

Funder

Department of Energy, Office of Science, Basic Energy Sciences (BES), Materials Science and Engineering

U.S. Department of Commerce, National Institute of Standards and Technology, Center for Hierarchical Materials Design, MICCoM

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.macromol.7b00691

Reference47 articles.

1. Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly

2. Directed Assembly of Block Copolymer Blends into Nonregular Device-Oriented Structures

3. Graphoepitaxy of Self-Assembled Block Copolymers on Two-Dimensional Periodic Patterned Templates

4. Complex self-assembled patterns using sparse commensurate templates with locally varying motifs

5. Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist

Cited by 28 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Bayesian model calibration for block copolymer self-assembly: Likelihood-free inference and expected information gain computation via measure transport;Journal of Computational Physics;2024-04

2. Bayesian model calibration for diblock copolymer thin film self-assembly using power spectrum of microscopy data and machine learning surrogate;Computer Methods in Applied Mechanics and Engineering;2023-12

3. A nonlocal theory of heat transfer and micro-phase separation of nanostructured copolymers;International Journal of Heat and Mass Transfer;2023-11

4. Revealing the 3D Structure of Block Copolymers with Electron Microscopy: Current Status and Future Directions;ACS Applied Materials & Interfaces;2023-06-20

5. “Lubrication Brain” ― A machine learning framework of lubrication oil molecule design;Tribology International;2023-05