Effect of AlN and AlGaN Interlayers on AlScN/GaN Heterostructures Grown by Metal–Organic Chemical Vapor Deposition

Author:

Streicher Isabel1ORCID,Leone Stefano1,Manz Christian1,Kirste Lutz1,Prescher Mario1,Waltereit Patrick1,Mikulla Michael1,Quay Rüdiger12,Ambacher Oliver3

Affiliation:

1. Fraunhofer Institute for Applied Solid State Physics IAF, Tullastrasse 72, 79108 Freiburg, Germany

2. Fritz-Hüttinger Chair for Energy-Efficient High-Frequency Electronics (EEH) Institute for Sustainable Systems Engineering (INATECH), University of Freiburg, Emmy-Noether-Strasse 2, 79110 Freiburg, Germany

3. Gips-Schüle Chair for Power Electronics, Institute for Sustainable Systems Engineering (INATECH), University of Freiburg, Emmy-Noether-Strasse 2, 79110 Freiburg, Germany

Funder

Bundesministerium f?r Bildung und Forschung

Publisher

American Chemical Society (ACS)

Subject

Condensed Matter Physics,General Materials Science,General Chemistry

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