Optimization and Structural Characterization of W/Al2O3 Nanolaminates Grown Using Atomic Layer Deposition Techniques-Reference-Cited by-同舟云学术

Optimization and Structural Characterization of W/Al2O3 Nanolaminates Grown Using Atomic Layer Deposition Techniques

Published:2005-05-28 Issue:13 Volume:17 Page:3475-3485
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Sechrist Z. A.¹,Fabreguette F. H.¹,Heintz O.¹,Phung T. M.¹,Johnson D. C.¹,George S. M.¹

Affiliation:

1. Department of Chemistry and Biochemistry and Department of Chemical and Biological Engineering, University of Colorado, Boulder, Colorado 80309; Laboratoire de Recherches sur la Réactivité des Solides, UMR 5613, Université de Bourgogne, 9 Avenue A. Savary BP 47870, 21078 Dijon Cedex, France; and Department of Chemistry and Materials Science Institute, University of Oregon, Eugene, Oregon 97403

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm050470y

Reference54 articles.

1. The search for novel, superhard materials

2. Nanometer scale multilayered hard coatings

3. Thermal conductivity and heat transfer in superlattices

4. Thermal conductivity and ballistic-phonon transport in the cross-plane direction of superlattices

5. Surface Chemistry for Atomic Layer Growth

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