Evaluation of Mechanical Properties of Porous OSG Films by PFQNM AFM and Benchmarking with Traditional Instrumentation-Reference-Cited by-同舟云学术

Evaluation of Mechanical Properties of Porous OSG Films by PFQNM AFM and Benchmarking with Traditional Instrumentation

Author:

Ovchinnikov I. S.¹,Vishnevskiy A. S.¹,Seregin D. S.¹,Rezvanov A. A.²³,Schneider D.⁴,Sigov A. S.¹,Vorotilov K. A.¹^ORCID,Baklanov M. R.¹⁵

Affiliation:

1. MIREA—Russian Technological University (RTU MIREA), Vernadsky Avenue 78, Moscow 119454, Russian Federation

2. Moscow Institute of Physics and Technology (MIPT), 9 Institutskiy per., Dolgoprudny, Moscow Region 141700, Russian Federation

3. Molecular Electronics Research Institute (MERI), 1st Zapadny Proezd 12/1, Zelenograd, Moscow 124460, Russian Federation

4. Fraunhofer-Institute for Material and Beam Technology, Winterbergstrasse 28, Dresden D-01277, Germany

5. North China University of Technology (NCUT), No. 5 Jinyuanzhuang Road, Shijingshan, Beijing 100144, China

Funder

Russian Foundation for Basic Research

Ministry of Science and Higher Education of the Russian Federation

Publisher

American Chemical Society (ACS)

Subject

Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science

Link

Reference65 articles.

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