Density and Capture Cross-Section of Interface Traps in GeSnO2 and GeO2 Grown on Heteroepitaxial GeSn

Author:

Gupta Somya12,Simoen Eddy13,Loo Roger1,Madia Oreste4,Lin Dennis1,Merckling Clement1,Shimura Yosuke14,Conard Thierry1,Lauwaert Johan5,Vrielinck Henk3,Heyns Marc12

Affiliation:

1. Imec, Kapeldreef 75, Leuven B-3001, Belgium

2. Department of Metallurgy and Materials Engineering (MTM), KU Leuven, Kasteelpark Arenberg 10, Leuven B-3001, Belgium

3. Department of Solid State Sciences, Ghent University, Krijgslaan 281/S1, Gent B-9000, Belgium

4. Department of Physics and Astronomy, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium

5. Department of Electronics and Information Systems, Ghent University, Sint-Pietersnieuwstraat 41, B-9000 Gent, Belgium

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

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