Atomic Layer Deposition of Aluminum and Titanium Phosphates-Reference-Cited by-同舟云学术

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Atomic Layer Deposition of Aluminum and Titanium Phosphates

Published:2012-02-22 Issue:9 Volume:116 Page:5920-5925
ISSN:1932-7447
Container-title:The Journal of Physical Chemistry C
language:en
Short-container-title:J. Phys. Chem. C

Author:

Hämäläinen Jani¹,Holopainen Jani¹,Munnik Frans²,Heikkilä Mikko¹,Ritala Mikko¹,Leskelä Markku¹

Affiliation:

1. Laboratory of Inorganic Chemistry, Department of Chemistry, P.O. Box 55, FI-00014, University of Helsinki, Finland

2. Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, P.O. Box 510119, D-01314 Dresden, Germany

Publisher

American Chemical Society (ACS)

Subject

Surfaces, Coatings and Films,Physical and Theoretical Chemistry,General Energy,Electronic, Optical and Magnetic Materials

Link

https://pubs.acs.org/doi/pdf/10.1021/jp205222g

Reference27 articles.

1. Electrochemical properties of TiP2O7 and LiTi2(PO4)3 as anode material for lithium ion battery with aqueous solution electrolyte

2. Developments in Nanostructured Cathode Materials for High-Performance Lithium-Ion Batteries

3. The Effect of AlPO[sub 4]-Coating Layer on the Electrochemical Properties in LiCoO[sub 2] Thin Films

4. Metal-phosphate coating on LiCoO2 cathodes with high cutoff voltages

5. Nanostructural Effect of AlPO[sub 4]-Nanoparticle Coating on the Cycle-Life Performance in LiCoO[sub 2] Thin Films

Cited by 33 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Atomic layer deposition of metal phosphates;Applied Physics Reviews;2022-03

2. Atomic layer deposition of titanium phosphate onto reinforcing fibers using titanium tetrachloride, water, and tris(trimethylsilyl) phosphate as precursors;Journal of Vacuum Science & Technology A;2022-03

3. Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory;Journal of Vacuum Science & Technology A;2021-12

4. Phosphites as precursors in atomic layer deposition thin film synthesis;Journal of Vacuum Science & Technology A;2021-05

5. Synthesis and integration of thin film solid state electrolytes for 3D Li-ion microbatteries;Journal of Vacuum Science & Technology A;2020-05

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