Atomic layer deposition of titanium phosphate onto reinforcing fibers using titanium tetrachloride, water, and tris(trimethylsilyl) phosphate as precursors-Reference-Cited by-同舟云学术

Atomic layer deposition of titanium phosphate onto reinforcing fibers using titanium tetrachloride, water, and tris(trimethylsilyl) phosphate as precursors

Published:2022-03 Issue:2 Volume:40 Page:022403
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Dill Pauline¹^ORCID,Ren Xiang¹^ORCID,Hintersatz Helen¹,Franz Mathias²^ORCID,Dentel Doreen³,Tegenkamp Christoph³^ORCID,Ebert Susann¹

Affiliation:

1. Physical Chemistry, Institute of Chemistry, Chemnitz University of Technology, Straße der Nationen 62, 09111 Chemnitz, Germany

2. Fraunhofer Institute for Electronic Nano Systems ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany

3. Analysis of Solid Surfaces, Institute of Physics, Chemnitz University of Technology, Reichenhainer Straße 70, 09126 Chemnitz, Germany

Funder

Deutsche Forschungsgemeinschaft

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001514

Reference101 articles.

1. Lithium Phosphate Thin Films Grown by Atomic Layer Deposition

2. Atomic layer deposition of lithium phosphates as solid-state electrolytes for all-solid-state microbatteries

3. Titanium Dioxide/Lithium Phosphate Nanocomposite Derived from Atomic Layer Deposition as a High-Performance Anode for Lithium Ion Batteries

4. Plasma - Assisted ALD of Lipo(N) for Solid State Batteries

5. Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate

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