Atomic Layer Deposition of Aluminum Phosphate Based on the Plasma Polymerization of Trimethyl Phosphate
Author:
Affiliation:
1. Department of Solid State Sciences, Ghent University, Krijgslaan 281 S1, 9000 Gent, Belgium
2. IMEC, Kapeldreef 75, 3001 Leuven, Belgium
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cm503587w
Reference28 articles.
1. Crystallinity of inorganic films grown by atomic layer deposition: Overview and general trends
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5. Lithium Phosphate Thin Films Grown by Atomic Layer Deposition
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