Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory-Reference-Cited by-同舟云学术

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Atomic layer deposition of lithium metaphosphate from H3PO4 and P4O10 facilitated via direct liquid injection: Experiment and theory

Published:2021-12 Issue:6 Volume:39 Page:062407
ISSN:0734-2101
Container-title:Journal of Vacuum Science & Technology A
language:en
Short-container-title:Journal of Vacuum Science & Technology A

Author:

Kundrata Ivan¹,Mošková Antónia¹,Moško Martin¹²,Mičušík Matej³,Dobročka Edmund¹,Fröhlich Karol¹⁴

Affiliation:

1. Institute of Electrical Engineering, Slovak Academy of Sciences, 841 04 Bratislava, Slovakia

2. Faculty of Mathematics, Physics and Informatics, Comenius University, 842 48 Bratislava, Slovakia

3. Polymer Institute, Slovak Academy of Sciences, Dúbravská cesta 9, 845 41 Bratislava, Slovakia

4. Centre for Advanced Materials Application, SAS, Dúbravská cesta 5807/9, 845 11 Bratislava, Slovakia

Funder

Vedecká Grantová Agentúra MŠVVaŠ SR a SAV

European Regional Development Fund

Publisher

American Vacuum Society

Subject

Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics

Link

https://avs.scitation.org/doi/pdf/10.1116/6.0001255

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Poly(Imide) Separator Functionalized by Melamine Phosphonic Acid for Regulating Structural and Thermal Stabilities of Lithium-ion Batteries;Journal of Electrochemical Science and Technology;2024-08-31

2. Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It;ACS Materials Au;2023-04-27

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