Low-Dielectric, Nanoporous Organosilicate Films Prepared via Inorganic/Organic Polymer Hybrid Templates-Reference-Cited by-同舟云学术

Low-Dielectric, Nanoporous Organosilicate Films Prepared via Inorganic/Organic Polymer Hybrid Templates

Published:1999-10-27 Issue:11 Volume:11 Page:3080-3085
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Nguyen Cattien V.¹,Carter Kenneth R.¹,Hawker Craig J.¹,Hedrick James L.¹,Jaffe Richard L.¹,Miller Robert D.¹,Remenar Julius F.¹,Rhee Hee-Woo¹,Rice Philip M.¹,Toney Michael F.¹,Trollsås Mikael¹,Yoon Do Y.¹

Affiliation:

1. IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, California 95120; ELORET Inc., 690 W. Fremont, Sunnyvale, California 94087; NASA-Ames Research Center, Moffett Field, California 94035; Department of Chemical Engineering, Sogang University, Seoul, Korea; and Department of Chemistry, Seoul National University, Seoul 151-742, Korea

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/cm990114d

Reference19 articles.

1. The National Technology Roadmap for Semiconductors; Semiconductor Industry Association: San Jose, CA, 1997.

2. Silica aerogel films at ambient pressure

3. Nanoporous Silica as an Ultralow-k Dielectric

4. Continuous formation of supported cubic and hexagonal mesoporous films by sol–gel dip-coating

5. Triblock Copolymer Syntheses of Mesoporous Silica with Periodic 50 to 300 Angstrom Pores

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