Complementary Metal Oxide Semiconductor Cantilever Arrays on a Single Chip: Mass-Sensitive Detection of Volatile Organic Compounds
Author:
Affiliation:
1. ETH Zurich, Physical Electronics Laboratory, HPT-H4.2, 8093 Zurich, Switzerland
Publisher
American Chemical Society (ACS)
Subject
Analytical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ac011269j
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