Optimizing the piezoresistive design on the microcantilever for enhancing stress sensing and temperature effects

Abstract

This paper addresses the issue of volatile organic compounds (VOCs), hazardous materials commonly present in paints, perfumes, petroleum and oil refineries, and plastic products, which can lead to health hazards. The detection of these toxic compounds has been a compelling subject for researchers. In this study, a novel approach is presented, involving the design of a sensor for VOC determination using a piezoresistive microcantilever. Microcantilevers have gained significant attention in electrochemical applications due to their enhanced sensitivity. The research explores various design factors, such as length, thickness, and material selection, to optimize the sensor’s response. Specifically, reducing the cantilever’s thickness is considered to improve the deflection sensitivity. To enhance the sensitivity of the piezoresistive sensor, particular emphasis is placed on developing the piezoresistive sensing layer to effectively address stress-induced changes. Experimental investigations involve exploring different cantilever shapes and piezolayer configurations to achieve the desired optimized condition. Ultimately, the rectangular cantilever shape is reshaped into a U-shape, which demonstrates enhanced sensitivity, offering promising possibilities for VOC detection. This study presents valuable insights into the design and optimization of piezoresistive microcantilever sensors for efficient VOC detection, its temperature effects, and monitoring applications.