Gas-Phase Reactions between Silane and Ammonia: A Theoretical Study
Author:
Affiliation:
1. Department of Applied Chemistry, College of Chemistry and Molecular Engineering, Peking University, Beijing, China 100871
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/jp035684m
Reference43 articles.
1. Kinetics of Silylene Insertion into N−H Bonds and the Mechanism and Kinetics of the Pyrolysis of Dimethylsilylamine
2. Theoretical study of the thermochemistry of molecules in the silicon-nitrogen-hydrogen-fluorine system
3. Matrix Isolation Investigation of the Interaction of SiH4 with NH3 and (CH3)3N
4. Structural Trends in Silicon Atranes
5. On the Mechanism of Silicon Nitride Chemical Vapor Deposition from Dichlorosilane and Ammonia
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