Real-Time Shape Evolution of Nanoimprinted Polymer Structures during Thermal Annealing-Reference-Cited by-同舟云学术

Real-Time Shape Evolution of Nanoimprinted Polymer Structures during Thermal Annealing

Published:2006-07-18 Issue:8 Volume:6 Page:1723-1728
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Jones Ronald L.¹,Hu Tengjiao¹,Soles Christopher L.¹,Lin Eric K.¹,Reano Ronald M.¹,Pang Stella W.¹,Casa Diego M.¹

Affiliation:

1. Polymers Division, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, Department of Electrical Engineering and Computer Science, University of Michigan, Ann Arbor, Michigan 48109, and CMC-CAT, Advanced Photon Source, Argonne National Laboratory, Argonne, Illinois 60439

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/nl061086i

Reference14 articles.

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3. Fabrication of 5nm linewidth and 14nm pitch features by nanoimprint lithography

4. Polymer Imprint Lithography with Molecular-Scale Resolution

5. 2004 International Technology Roadmap for Semiconductors: http://public.itrs.net.

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