Use of Substituted Bis(acetylacetone)ethylenediimine and Dialkyldithiocarbamate Ligands for Copper Chelation in Supercritical Carbon Dioxide-Reference-Cited by-同舟云学术

Use of Substituted Bis(acetylacetone)ethylenediimine and Dialkyldithiocarbamate Ligands for Copper Chelation in Supercritical Carbon Dioxide

Published:2006-11-23 Issue:26 Volume:45 Page:8779-8787
ISSN:0888-5885
Container-title:Industrial & Engineering Chemistry Research
language:en
Short-container-title:Ind. Eng. Chem. Res.

Author:

Dunbar Andrew¹,Omiatek Donna M.¹,Thai Susan D.¹,Kendrex Christopher E.¹,Grotzinger Laurel L.¹,Boyko Walter J.¹,Weinstein Randy D.¹,Skaf Dorothy W.¹,Bessel Carol A.¹,Denison Ginger M.¹,DeSimone Joseph M.¹

Affiliation:

1. Departments of Chemistry and Chemical Engineering, Villanova University, 800 Lancaster Avenue, Villanova, Pennsylvania 19085; Department of Chemistry, University of North Carolina at Chapel Hill, Chapel Hill, North Carolina 27599; and Department of Chemical Engineering, North Carolina State University, Raleigh, North Carolina 27695

Publisher

American Chemical Society (ACS)

Subject

Industrial and Manufacturing Engineering,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ie060947v

Reference66 articles.

1. Chemical Mechanical Planarization of Microelectronic Materials

2. Advances in Chemical-Mechanical Planarization

3. Development and Application of an Abrasive-Free Polishing Solution for Copper

4. Chemical-mechanical polishing of copper for interconnect formation

5. Copper Dissolution in Aqueous Ammonia-Containing Media during Chemical Mechanical Polishing

Cited by 8 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Oxidative Dissolution of Metals in Organic Solvents;Chemical Reviews;2021-03-16

2. Time dependent-density functional theory (TD-DFT) and experimental studies of UV–Visible spectra and cyclic voltammetry for Cu(II) complex with Et2DTC;Journal of Molecular Structure;2018-04

3. Complexation of Chiral Di (N-Protected a-Amino)-b-Diketones with Some Transition Metals;Asian Journal of Chemistry;2013

4. High-pressure fluid-phase equilibria: Experimental methods and systems investigated (2005–2008);Fluid Phase Equilibria;2011-01

5. Supercritical Fluids for the Fabrication of Semiconductor Devices: Emerging or Missed Opportunities?;Chemical Reviews;2009-12-17