Supercritical Fluids for the Fabrication of Semiconductor Devices: Emerging or Missed Opportunities?
Author:
Affiliation:
1. Polymer Science and Engineering Department, University of Massachusetts−Amherst, Amherst, Massachusetts 01003
Publisher
American Chemical Society (ACS)
Subject
General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cr900255w
Reference151 articles.
1. Fabrication of Device Nanostructures Using Supercritical Fluids
2. “Dry” Lithography Using Liquid and Supercritical Carbon Dioxide Based Chemistries and Processes
3. Applications of “Dry” Processing in the Microelectronics Industry Using Carbon Dioxide
4. Utilization of critical fluids in processing semiconductors and their related materials
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