Applications of “Dry” Processing in the Microelectronics Industry Using Carbon Dioxide-Reference-Cited by-同舟云学术

Applications of “Dry” Processing in the Microelectronics Industry Using Carbon Dioxide

Published:2004-07 Issue:3-4 Volume:29 Page:97-109
ISSN:1040-8436
Container-title:Critical Reviews in Solid State and Materials Sciences
language:en
Short-container-title:Critical Reviews in Solid State and Materials Sciences

Author:

Jones Charles A.¹,Zweber Amy²,DeYoung. James P.³,McClain James B.³,Carbonell Ruben²,DeSimone Joseph M.¹

Affiliation:

1. a University of North Carolina at Chapel Hill, Department of Chemistry , Chapel Hill, NC, 27599, USA

2. b North Carolina State University, Department of Chemical Engineering , Raleigh, NC, 27695, USA

3. c Micell Integrated Systems , Raleigh, NC, 27617, USA

Publisher

Informa UK Limited

Subject

Electrical and Electronic Engineering,Physical and Theoretical Chemistry,Condensed Matter Physics,General Chemical Engineering,Electronic, Optical and Magnetic Materials

Link

https://www.tandfonline.com/doi/pdf/10.1080/10408430490888968

Reference85 articles.

1. The 1.7 Kilogram Microchip: Energy and Material Use in the Production of Semiconductor Devices

2. Low dielectric constant polymers for microelectronics

3. New Directions in Inorganic and Metal-Organic Coordination Chemistry in Supercritical Fluids

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