Modeling of Chemical Vapor Deposition of Large-Area Silicon Carbide Thin Film
Author:
Affiliation:
1. Department of Mechanical Engineering, University of Maryland Baltimore County, 1000 Hilltop Circle, Baltimore, Maryland 21250
Publisher
American Chemical Society (ACS)
Subject
Condensed Matter Physics,General Materials Science,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/cg060401b
Reference29 articles.
1. SiC materials-progress, status, and potential roadblocks
2. Silicon carbide MEMS for harsh environments
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