Projection Photolithography Utilizing a Schwarzschild Microscope and Self-Assembled Alkanethiol Monolayers as Simple Photoresists
Author:
Affiliation:
1. Materials Science and Chemistry Divisions, Argonne National Laboratory, Argonne, Illinois 60439, and Department of Chemistry and Institute for Surface and Interface Science, University of California, Irvine, California 92717
Publisher
American Chemical Society (ACS)
Subject
Electrochemistry,Spectroscopy,Surfaces and Interfaces,Condensed Matter Physics,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/la950811u
Reference22 articles.
1. Self-Assembly Comes Together
2. Photopatterning of Self-Assembled Alkanethiolate Monolayers on Gold: A Simple Monolayer Photoresist Utilizing Aqueous Chemistry
3. Photooxidation of thiols in self-assembled monolayers on gold
4. UV photopatterning of alkanethiolate monolayers self-assembled on gold and silver
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