Microscope projection photolithography based on liquid crystal microdisplay
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy
Link
https://iopscience.iop.org/article/10.1088/1361-6404/ab988f/pdf
Reference14 articles.
1. Field Guide to Optical Lithography
2. Microscope Projection Photolithography for Rapid Prototyping of Masters with Micron-Scale Features for Use in Soft Lithography
3. Theory and practice of image formation by the photoprojection method of submicron patterns
4. Projection Photolithography Utilizing a Schwarzschild Microscope and Self-Assembled Alkanethiol Monolayers as Simple Photoresists
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