Chemical Vapor Deposition of Gallium Nitride from the GaCl3+NH3 System. Theoretical Study of the Structure and Thermodynamics of Potential Intermediates Formed in the Gaseous Phase-Reference-Cited by-同舟云学术

Chemical Vapor Deposition of Gallium Nitride from the GaCl3+NH3 System. Theoretical Study of the Structure and Thermodynamics of Potential Intermediates Formed in the Gaseous Phase

Published:2002-05-15 Issue:12 Volume:41 Page:3067-3075
ISSN:0020-1669
Container-title:Inorganic Chemistry
language:en
Short-container-title:Inorg. Chem.

Author:

Kovács Attila¹

Affiliation:

1. Research Group for Technical Analytical Chemistry of the Hungarian Academy of Sciences at the Institute of General and Analytical Chemistry, Technical University of Budapest, H-1111 Budapest, Szt. Gellért tér 4, Hungary

Publisher

American Chemical Society (ACS)

Subject

Inorganic Chemistry,Physical and Theoretical Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/ic011140s

Reference73 articles.

1. High-Luminosity Blue and Blue-Green Gallium Nitride Light-Emitting Diodes

2. Low-temperature metalorganic chemical vapour deposition of AlN for surface passivation of GaAs

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