Novel Inorganic−Organic Hybrid Block Copolymers as Pore Generators for Nanoporous Ultralow-Dielectric-Constant Films
Author:
Affiliation:
1. School of Chemistry, Seoul National University, Seoul 151-747, Korea; Institut für Organische Chemie, University of Mainz, D-55099 Mainz; and Department of Physics, University of Michigan, Ann Arbor, Michigan 48109
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,Inorganic Chemistry,Polymers and Plastics,Organic Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ma048353w
Reference15 articles.
1. Organic/Inorganic Nanocomposite Star Polymers via Atom Transfer Radical Polymerization of Methyl Methacrylate Using Octafunctional Silsesquioxane Cores
2. Low-Dielectric, Nanoporous Organosilicate Films Prepared via Inorganic/Organic Polymer Hybrid Templates
3. Nanoporous Ultralow Dielectric Constant Organosilicates Templated by Triblock Copolymers
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