Ultrafast Laser 3D Nanolithography of Fiber-Integrated Silica Microdevices

Author:

Zhu Dezhi123,Jiang Shangben13,Liao Changrui13ORCID,Xu Lei4,Wang Ying13ORCID,Liu Dejun13,Bao Weijia13,Wang Famei13,Huang Haoqiang13,Weng Xiaoyu1,Liu Liwei1ORCID,Qu Junle1,Wang Yiping123

Affiliation:

1. Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518060, China

2. Guangdong Laboratory of Artificial Intelligence and Digital Economy (SZ), Shenzhen 518060, China

3. Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen 518060, China

4. School of Electronic and Communication Engineering, Shenzhen Polytechnic University, Shenzhen 518055, China

Funder

Science and Technology Foundation of Shenzhen City

China Postdoctoral Science Foundation

National Natural Science Foundation of China

Natural Science Foundation of Guangdong Province

Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing

Publisher

American Chemical Society (ACS)

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