Deep-Learning-Assisted Focused Ion Beam Nanofabrication-Reference-Cited by-同舟云学术

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Deep-Learning-Assisted Focused Ion Beam Nanofabrication

Published:2022-03-24 Issue:7 Volume:22 Page:2734-2739
ISSN:1530-6984
Container-title:Nano Letters
language:en
Short-container-title:Nano Lett.

Author:

Buchnev Oleksandr¹^ORCID,Grant-Jacob James A.¹,Eason Robert W.¹,Zheludev Nikolay I.¹²,Mills Ben¹^ORCID,MacDonald Kevin F.¹^ORCID

Affiliation:

1. Optoelectronics Research Centre, University of Southampton, Highfield, Southampton SO17 1BJ, United Kingdom

2. Centre for Disruptive Photonic Technologies & The Photonics Institute, SPMS, Nanyang Technological University, Singapore 637371, Singapore

Funder

Engineering and Physical Sciences Research Council

Ministry of Education - Singapore

Publisher

American Chemical Society (ACS)

Subject

Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.nanolett.1c04604

Reference37 articles.

1. Focused Ion Beam Micro- and Nanoengineering

2. High Resolution Focused Ion Beams: FIB and its Applications

3. Simulation of focused ion beam milling

4. Level Set Methods: An Overview and Some Recent Results

5. Level set approach for the simulation of focused ion beam processing on the micro/nano scale

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