Surfing Scanning Probe Nanolithography at Meters Per Second
Author:
Affiliation:
1. Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47906, United States
2. School of Mechanical Engineering, Purdue University, West Lafayette, Indiana 47906, United States
Funder
Division of Civil, Mechanical and Manufacturing Innovation
Publisher
American Chemical Society (ACS)
Subject
Mechanical Engineering,Condensed Matter Physics,General Materials Science,General Chemistry,Bioengineering
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.nanolett.1c03705
Reference49 articles.
1. Advanced scanning probe lithography
2. "Dip-Pen" Nanolithography
3. Modification of hydrogen‐passivated silicon by a scanning tunneling microscope operating in air
4. Direct fabrication of thin layer MoS2 field-effect nanoscale transistors by oxidation scanning probe lithography
5. Thermochemical nanopatterning of organic semiconductors
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