Characterizing vibration-assisted atomic force microscopy (AFM)-based nanomachining via perception of acoustic emission phenomena using a sensor-based real-time monitoring approach-Reference-Cited by-同舟云学术

Characterizing vibration-assisted atomic force microscopy (AFM)-based nanomachining via perception of acoustic emission phenomena using a sensor-based real-time monitoring approach

Published:2022-10 Issue: Volume:34 Page:6-11
ISSN:2213-8463
Container-title:Manufacturing Letters
language:en
Short-container-title:Manufacturing Letters

Author:

Ma Qiyang,Zhou Huimin,Deng Jia^ORCID,Wang Zimo^ORCID

Funder

Empire State Development's Division of Science, Technology and Innovation

National Science Foundation

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanics of Materials

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3. Scratch on polymer materials using AFM tip-based approach: a review;Yan;Polymers,2019

4. Dislocation of antimony clusters on graphite by means of dynamic plowing nanolithography;Heyde;Surf Sci,2001

5. Nanolithography with an atomic force microscope by means of vector-scan controlled dynamic plowing;Klehn;J Appl Phys,1999

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