A sensor-based monitoring approach to predict surface profile of vibration-assisted atomic force microscopy (AFM)-based nanofabrication-Reference-Cited by-同舟云学术

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A sensor-based monitoring approach to predict surface profile of vibration-assisted atomic force microscopy (AFM)-based nanofabrication

Published:2023-08 Issue: Volume:35 Page:1119-1126
ISSN:2213-8463
Container-title:Manufacturing Letters
language:en
Short-container-title:Manufacturing Letters

Author:

Wang Xinchen,Zhou Huimin,Deng Jia,Wang Zimo

Funder

Binghamton University

Empire State Development's Division of Science, Technology and Innovation

National Science Foundation

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanics of Materials

Reference24 articles.

1. Microporous multiresonant plasmonic meshes by hierarchical micro-nanoimprinting for bio-interfaced SERS imaging and nonlinear nano-optics;Garg;Small,2022

2. Atomic and close-to-atomic scale manufacturing: a review on atomic layer removal methods using atomic force microscopy;Mathew;Nanomanufacturing Metrol,2020

3. Ortlepp I, Stauffenberg J, Krötschl A, Dontsov D, Zöllner J-P, Hesse S, et al. Nanofabrication and -metrology by using the nanofabrication machine (NFM-100). In: Panning EM, Liddle JA, editors. Nov. Patterning Technol. 2022, San Jose, United States: SPIE; 2022, p. 30.

4. Surfing Scanning Probe Nanolithography at Meters Per Second;Yao;Nano Lett,2022

5. Rangelow IW, Kaestner M, Ivanov T, Ahmad A, Lenk S, Lenk C, et al. Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy. J Vac Sci Technol B 2018;36:06J102.

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