Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy-Reference-Cited by-同舟云学术

Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopy

Published:2018-11 Issue:6 Volume:36 Page:06J102
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B
language:en
Short-container-title:Journal of Vacuum Science & Technology B

Author:

Rangelow Ivo W.¹²,Kaestner Marcus¹,Ivanov Tzvetan¹,Ahmad Ahmad¹²,Lenk Steve¹,Lenk Claudia¹,Guliyev Elshad¹,Reum Alexander¹²,Hofmann Martin¹,Reuter Christoph²,Holz Mathias²

Affiliation:

1. Technische Universität Ilmenau, MNES, IMNE, Gustav-Kirchhoff-Straße1, 98693 Ilmenau, Deutschland

2. nano analytik GmbH, Ehrenbergstr. 1, 98693 Ilmenau, Deutschland

Funder

EU Commission

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.5048524

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