1. Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China
2. School of Physical Sciences, University of Chinese Academy of Sciences, Beijing, 100190, China
3. State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou 310027, China
4. Songshan Lake Materials Laboratory, Dongguan, Guangdong 523808, China
5. Zhejiang Province Key Laboratory of Quantum Technology and Device, Department of Physics, Zhejiang University, Hangzhou 310027, China