Molecular Layer Etching of Metalcone Films Using Lithium Organic Salts and Trimethylaluminum-Reference-Cited by-同舟云学术

Molecular Layer Etching of Metalcone Films Using Lithium Organic Salts and Trimethylaluminum

Author:

Young Matthias J.¹²³^ORCID,Choudhury Devika¹,Letourneau Steven¹^ORCID,Mane Anil¹,Yanguas-Gil Angel¹,Elam Jeffrey W.¹^ORCID

Affiliation:

1. Applied Materials Division, Argonne National Laboratory, Lemont, Illinois 60439, United States

2. Department of Biomedical, Biological, and Chemical Engineering, University of Missouri, Columbia, Missouri 65211, United States

3. Department of Chemistry, University of Missouri, Columbia, Missouri 65211, United States

Funder

Basic Energy Sciences

University of Missouri

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

Reference49 articles.

2. Limited, T. S. M. C. 7nm Technology https://www.tsmc.com/english/dedicatedFoundry/technology/7nm.htm(accessed Jul 6, 2019).

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