Low-Temperature Phase-Controlled Synthesis of Titanium Di- and Tri-sulfide by Atomic Layer Deposition
Author:
Affiliation:
1. Eurofins Materials Science, High Tech Campus 11, 5656 AE Eindhoven, The Netherlands
Funder
H2020 European Research Council
Nederlandse Organisatie voor Wetenschappelijk Onderzoek
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
http://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.9b02895
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