Area-Selective Molecular Layer Deposition of Polyimide on Cu through Cu-Catalyzed Formation of a Crystalline Interchain Polyimide
Author:
Affiliation:
1. Department of Chemistry, University of Helsinki, P.O. Box 55, 00014 Helsinki, Finland
2. ASM Microchemistry, 00560 Helsinki, Finland
Funder
China Scholarship Council
ASM Microchemistry
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
http://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.0c00898
Reference76 articles.
1. Pan, D. Z.; Liebmann, L.; Yu, B.; Xu, X.; Lin, Y. Pushing Multiple Patterning in Sub-10 nm: Are We Ready? 52nd ACM/EDAC/IEEE Design Automation Conference (DAC); IEEE: San Francisco, CA, June 8–12, 2015.
2. Overlay and edge placement control strategies for the 7nm node using EUV and ArF lithography
3. Perspective: New process technologies required for future devices and scaling
4. Atomic layer deposition (ALD): from precursors to thin film structures
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Photocatalytic Surface Initiation for Area-Selective Chemical Vapor Deposition of Polymer Thin Film;ACS Materials Letters;2024-08-05
2. Area selective deposition for bottom-up atomic-scale manufacturing;International Journal of Machine Tools and Manufacture;2024-06
3. Tunable evaporation-induced surface morphologies on chitosan film for light management;International Journal of Biological Macromolecules;2024-04
4. High Electrical and Mechanical Properties Obtained in a Polyimide‐Based Nanocomposite with Sandwich Structure via Multidimensional Design;Macromolecular Chemistry and Physics;2024-01-12
5. 2D Materials in Flexible Electronics: Recent Advances and Future Prospectives;Chemical Reviews;2023-12-06
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3