1. School of Integrated Circuits, School of Optical and Electronic Information, Huazhong University of Science and Technology, Wuhan430074, China
2. Hubei Yangtze Memory Laboratories, Wuhan430205, China
3. Key Laboratory of Polar Materials and Devices (MOE), Department of Electronics, East China Normal University, Shanghai200241, China
4. Key Laboratory of Microelectronics Devices and Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing100029, China