Effect of ternary compound on HfO2-Al2O3 mixture coatings revealed by solid-state NMR and TOF-SIMS
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Published:2024-12
Issue:
Volume:184
Page:108785
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ISSN:1369-8001
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Container-title:Materials Science in Semiconductor Processing
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language:en
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Short-container-title:Materials Science in Semiconductor Processing
Author:
Wen JiahuiORCID,
Ke Liang,
Ren Jinjun,
Shao Jianda,
Zhu Meiping