Dopant Distribution in Atomic Layer Deposited ZnO:Al Films Visualized by Transmission Electron Microscopy and Atom Probe Tomography
Author:
Affiliation:
1. Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
2. CAMECA Instruments Inc., 5500 Nobel Drive, Madison, Wisconsin 53711, United States
3. Holst Centre, P.O. Box 8550, 5605 KN Eindhoven, The Netherlands
Funder
Stichting voor de Technische Wetenschappen
Horizon 2020 Framework Programme
Nederlandse Organisatie voor Wetenschappelijk Onderzoek
Holst Centre
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
http://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.7b03501
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1. Frontier of transparent conductive oxide thin films
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4. Transparent Conducting Oxides for Photovoltaics
5. Transparent conducting oxide semiconductors for transparent electrodes
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