Saturation degree in dopant monolayers as modulator of Al-doping of ZnO by the Atomic Layer Deposition-supercycle approach
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Published:2024-10
Issue:
Volume:806
Page:140532
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ISSN:0040-6090
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Container-title:Thin Solid Films
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language:en
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Short-container-title:Thin Solid Films
Author:
Mazón-Montijo Dalia AlejandraORCID,
Ortiz-Atondo Axel AgustínORCID,
Zúñiga-Verdugo GerdanyORCID,
Cabrera-German DagobertoORCID,
Ramírez-Esquivel Obed YamínORCID,
Montiel-González ZeuzORCID