Atomic Layer Deposition of Silica on Carbon Nanotubes
Author:
Affiliation:
1. Institut für Chemie and IRIS Adlershof, Humboldt-Universität zu Berlin, Brook-Taylor-Strasse 2, 12489 Berlin, Germany
Funder
Deutsche Forschungsgemeinschaft
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.7b01165
Reference96 articles.
1. Atomic Layer Deposition: An Overview
2. Tailoring nanoporous materials by atomic layer deposition
3. Metal Infiltration into Biomaterials by ALD and CVD: A Comparative Study
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5. The use of atomic layer deposition in advanced nanopatterning
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