Deposition of MnO Anode and MnO2 Cathode Thin Films by Plasma Enhanced Atomic Layer Deposition Using the Mn(thd)3 Precursor
Author:
Affiliation:
1. Department of Solid State Sciences, Ghent University, Krijgslaan 281 S1, 9000 Gent, Belgium
2. imec, Kapeldreef 75, 3001 Leuven, Belgium
3. Centre for Surface Chemistry and Catalysis, KU-Leuven, 3001 Leuven, Belgium
Funder
Agentschap voor Innovatie door Wetenschap en Technologie
Fonds Wetenschappelijk Onderzoek
Bijzonder Onderzoeksfonds, Universiteit Gent
European Commission
Publisher
American Chemical Society (ACS)
Subject
Materials Chemistry,General Chemical Engineering,General Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.5b00255
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1. High Energy Density All-Solid-State Batteries: A Challenging Concept Towards 3D Integration
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