Evolution of Crystal Structure During the Initial Stages of ZnO Atomic Layer Deposition-Reference-Cited by-同舟云学术

Evolution of Crystal Structure During the Initial Stages of ZnO Atomic Layer Deposition

Published:2016-01-14 Issue:2 Volume:28 Page:592-600
ISSN:0897-4756
Container-title:Chemistry of Materials
language:en
Short-container-title:Chem. Mater.

Author:

Boichot R.¹,Tian L.²,Richard M.-I.³⁴,Crisci A.¹,Chaker A.²,Cantelli V.²,Coindeau S.¹,Lay S.¹,Ouled T.³,Guichet C.³,Chu M. H.⁵,Aubert N.⁵,Ciatto G.⁵,Blanquet E.¹,Thomas O.³,Deschanvres J.-L.²,Fong D. D.⁶,Renevier H.²

Affiliation:

1. Univ. Grenoble Alpes, SIMAP, F-38000 Grenoble, France, and CNRS, SIMAP, F-38000 Grenoble, France

2. Univ. Grenoble Alpes, LMGP, F-38000 Grenoble, France, and CNRS, LMGP, F-38000 Grenoble, France

3. Aix-Marseille Université, CNRS, Université de Toulon, IM2NP UMR 7334, F-13397 Marseille, France

4. ID01, European Synchrotron Radiation Facility, F-38043 Grenoble, France

5. Synchrotron SOLEIL—Beamline SIRIUS, L’Orme des Merisiers, Saint-Aubin, F-91192, Gif sur Yvette, France

6. Materials Science Division, Argonne National Laboratory, 9700 S. Cass Ave., Argonne, Illinois 60439, United States

Funder

Agence Nationale de la Recherche

Basic Energy Sciences

Fondation Nanosciences

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/acs.chemmater.5b04223

Reference51 articles.

1. Atomic Layer Deposition of Oxide Thin Films with Metal Alkoxides as Oxygen Sources

2. Propane Oxidation over Pt/SrTiO3 Nanocuboids

3. ALD for clean energy conversion, utilization, and storage

4. Island growth as a growth mode in atomic layer deposition: A phenomenological model

5. Shear mode electromechanical coupling coefficient k15 and crystallites alignment of (112¯0) textured ZnO films

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