Quantum Chemistry Study on Gas Reaction Mechanism in AlN MOVPE Growth
Author:
Affiliation:
1. Jiangsu University, Zhenjiang 212013, P. R. China
Funder
National Natural Science Foundation of China
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpca.9b11817
Reference25 articles.
1. Growth and applications of Group III-nitrides
2. Influence of polymer formation on metalorganic vapor-phase epitaxial growth of AlN
3. Influence of polymerization among Al- and Ga-containing molecules on growth rate and Al content in AlGaN
4. Quantum chemical study of parasitic reaction in III–V nitride semiconductor crystal growth
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