Theoretical Reassessment and Model Validation of Some Kinetic Parameters Relevant to Si/Cl/H Systems
Author:
Affiliation:
1. Unité de Chimie et des Procédés (UCP), ENSTA Paris, Institut Polytechnique de Paris, 91120 Palaiseau, France
Publisher
American Chemical Society (ACS)
Subject
Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.jpca.0c11272
Reference39 articles.
1. A shock tube study of the reaction of H atoms with SiCl4
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4. High-temperature kinetics of some Si- and Cl-containing ceramic precursors
5. Analysis of the Gas Phase Reactivity of Chlorosilanes
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