Highly Tunable Electrical Properties in Undoped ZnO Grown by Plasma Enhanced Thermal-Atomic Layer Deposition
Author:
Affiliation:
1. Department of Physics and Astronomy and ‡Department of Applied Science, University of Arkansas at Little Rock, Little Rock, Arkansas 72204, United States
Publisher
American Chemical Society (ACS)
Subject
General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/am300458q
Reference65 articles.
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5. Thin-film electronics by atomic layer deposition
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