Effect of water flow rate on properties of zinc oxide thin films prepared using spatial atomic layer deposition-Reference-Cited by-同舟云学术

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Effect of water flow rate on properties of zinc oxide thin films prepared using spatial atomic layer deposition

Published:2022-06 Issue: Volume:751 Page:139229
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Geng Xin-Peng,Hsu Chia-Hsun,Zhao Ming-Jie,Wu Wan-Yu,Chiu Yi-Jui,Lien Shui-Yang,Zhu Wen-Zhang

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference49 articles.

1. Aerosol assisted chemical vapour deposition of conformal ZnO compact layers for efficient electron transport in perovskite solar cells;Chen;Mater. Lett.,2018

2. Perovskite Solar Cells with ZnO Electron-Transporting Materials;Zhang;Adv. Mater.,2018

3. Room-temperature gas sensing of ZnO-based gas sensor: a review;Zhu;Sens. Actuators A,2017

4. Bidirectional electroluminescence from p -SnO 2 /i -MgZnO/ n -ZnO heterojunction light-emitting diodes;Yang;J. Lumin.,2017

5. Fully flexible solution-deposited ZnO thin-film transistors;Song;Adv. Mater.,2010

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Low temperature (002)-oriented zinc oxide films prepared using ozone-based spatial atomic layer deposition;Ceramics International;2024-08

2. Performance enhancement of HfO₂-based resistive random-access memory devices using ZnO nanoparticles;Nanotechnology;2023-07-14

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