Electrical behavior of zinc oxide layers grown by low temperature atomic layer deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2830940
Reference17 articles.
1. A comprehensive review of ZnO materials and devices
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4. Scaling behavior of ZnO transparent thin-film transistors
5. Effects of the channel thickness on the structural and electrical characteristics of room-temperature fabricated ZnO thin-film transistors
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