A New Route to the Production and Nanoscale Patterning of Highly Smooth, Ultrathin Zirconium Oxide Films
Author:
Affiliation:
1. Department of Chemistry, Durham University, South Road, DH1 3LE, U.K.
Publisher
American Chemical Society (ACS)
Subject
General Physics and Astronomy,General Engineering,General Materials Science
Link
https://pubs.acs.org/doi/pdf/10.1021/nn700138q
Reference51 articles.
1. ZrO 2 film growth by chemical vapor deposition using zirconium tetra- tert- butoxide
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5. Synthesis of ZrO2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties
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