Synthesis and Characterization of Volatile, Thermally Stable, Reactive Transition Metal Amidinates
Author:
Affiliation:
1. Department of Chemistry and Chemical Biology, Harvard University, Cambridge, Massachusetts 02138
Publisher
American Chemical Society (ACS)
Subject
Inorganic Chemistry,Physical and Theoretical Chemistry
Link
https://pubs.acs.org/doi/pdf/10.1021/ic0345424
Reference31 articles.
1. International Technology Roadmap for Semiconductors 2002 Update; Semiconductor Industry Association, 2002. Published on the Internet athttp://public.itrs.net/Files/2002Update/Home.pdf, Interconnect Chapter.
2. Ritala, M.; Leskelä, M. InHandbook of Thin Film Materials; Nalwa, H. S., Ed.; Academic Press: New York, 2001; Vol. 1, pp 103−159.
3. Atomic Layer Epitaxy
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